因應新興技術產品多樣化及較短的生命週期，現今與供應鏈合作的模式關係已經演進朝向「策略供應管理」。企業策略競爭的優勢部分依賴在供應鏈的競爭與管理，良好的供應鏈管理其中又以選擇適當的供應商最為重要。選定適當的供應商將進一步提升產品的競爭力及客戶滿意度。 在半導體產業的技術不斷精進，對於半導體製程設備系統的要求越來越複雜。除此之外，市場的需求也不斷地提升與擴充。伴隨著半導體製程設備市場規模的擴充，半導體製程設備商在台灣現地的採購金額也將持續成長。在所有的前段晶圓製程設備中，以乾蝕刻設備腔體中所使用的消耗零件為居多。消耗零件的良窳在於設備性能有決定性的影響、進而對於客戶產品的製程良率也有顯著的貢獻。目前也依據客戶的方針及需求在台灣現地建立所需消耗零件的供應鏈，因此該消耗零件供應商的建立及選定結果勢必影響到對客戶端的供給。 供應商的選定是一種多準則決策的問題(Multiple Criteria Decision Making)，本研究將以決策實驗室分析法DEMATEL(Decision Making Trial and Evaluation Laboratory)，探討半導體設備製造商既有的供應商選定要項，在台灣選定耗材供應商各個構面與準則間之關聯度及因果關係﹔再以網路程序分析法ANP(Analytic Network Process)得到各準則 間相對性權重的分析。 ;In response to the diversification and short life cycle of new technology products, the relationship with supply chain cooperation has evolved to “strategic supply management” mode. The advantages of strategic corporate competition depend on part of competition and management in supply chain, choosing the appropriate supplier is the most important part of supply chain management. The selection of the right suppliers will further enhance the competitiveness and customer satisfaction of the products. As the technologies in the semiconductor industry continue to improve, the requirements for process equipment systems become more and more complicated. In addition, the market demand continues to increase and expand. With the expansion of the market for semiconductor process equipment, the equipment vendors purchase amount of parts will also grow in Taiwan. In all wafer processing equipment, dry etching equipment used majority consumption parts in chamber. The consumable parts performance has a decisive influence, which in turn has a significant contribution to the process yield of the customer′s product. At present, to establish consumable parts supply chain is according to customer’s policy and demand in local. Therefore, the establishment of the consumable parts supplier and the selection result will inevitably affect the supply to the customer. Supplier selection is a multi-criteria decision making problem (Multiple Criteria Decision Making), In this paper, we will study decision-making laboratory analysis DEMATEL (Decision Making Trial and Evaluation Laboratory) to discuss the correlation and causal relationship between the selected facets and the criteria for the supplier of semiconductor process equipment in Taiwan, Then use the ANP (Analytic Network Process) to get the relative weight of every facet and criterion.
