Fabrication of optical transmission elements in an SiNx membrane

NCUIR > Research Center > Optical Sciences Center > journal & Dissertation > Item 987654321/35722

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35722

Title:	Fabrication of optical transmission elements in an SiNx membrane
Authors:	Lee,CC;Chang,YC;Chang,JY;Chiu,CF;Chi,GC
Contributors:	光電科學研究中心
Date:	2003
Issue Date:	2010-07-07 15:49:50 (UTC+8)
Publisher:	中央大學
Abstract:	This paper presents a method for the fabrication of silicon-based optical elements in an SiNx membrane. This device will transmit visible and infrared light, and can be used for various types of optical elements, such as gratings, lenses, diffractive opti
Relation:	MICROELECTRONIC ENGINEERING
Appears in Collections:	[Optical Sciences Center] journal & Dissertation

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