Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

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Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35704

Title:	Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane
Authors:	HSU Che-Lung,LIU Yung-Chih,WANG Chih-Ming,WU Mount-Learn,TSAI Ya-Lun,CHOU Yue-Hong,LEE Chien-Chieh,CHANG Jeng-Yang
Contributors:	光電科學研究中心
Keywords:	LOW SIDE-BAND;THIN-FILM;SPECTRAL RESPONSE;GRATING FILTERS;DESIGN
Date:	2006
Issue Date:	2010-07-07 15:49:23 (UTC+8)
Publisher:	中央大學
Abstract:	In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a low
Relation:	JOURNAL OF LIGHTWAVE TECHNOLOGY
Appears in Collections:	[Optical Sciences Center] journal & Dissertation

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